Chemical-free stress relief dry polishing wheel|
In addition to wafer polishing in the conventional grinding process, the DP08 realizes chemical-free stress relief that can even be used with the DBG process.
The DP08 series enables polishing of ultra-thin wafers with DISCO’s unique dry polishing process. In addition to having a low environmental impact by avoiding the use of chemicals, it achieves high die strength and is simple to operate compared to a process that uses slurry.
