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DFP1402
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DFP8140

Chemical-and slurry-free stress relief
Improved yield Relieve wafer stress without slurry, chemicals or water. The DFP8140/8160 effectively removes ...
DFG8560
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DFP8160

Chemical-and slurry-free stress relief
Improved yield Relieve wafer stress without slurry, chemicals or water. The DFP8140/8160 effectively removes ...
UVB-608i
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UVB-608i for up to 8"

Black-light type UVB-608i UVB-608i is adopted black-light fluorescent lamp and designed minimal specification for exceptional cost-performance value.
uvc300
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UVC-300

Model: UVC-300A for up to 12” UV-LED models which have a long life and low running cost are cassette to cassette fully automatic system and 200mm (8”) manual and 300mm (12”)
UVC-4088
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UVC-408 for 8”

High- pressure Mercury lamp models which have perfect UV curing performances is 200mm (8”) manual and 300mm (12”) manual system.

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