Super Bubbler Wac
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Nomura Science Co., Ltd.
Rinse water resistivity can be controlled in the best condition at the dicing process of semiconductor industries or high pressure rising process at the FPD industries.
Device breakage by electrostatic discharge or particles sticking by electrostatic attraction can be prevented, and its effects improve product yields greatly.
Features:
• System Type
- Choice from compact Rack type can be built in the wet station, or Cabinet type capacity of 2 CO2 cylinders in its containers
• Easy installation
- Possible to restore he outlet resistivity to the pre-set resistivity quickly in case of water flow surge.
• Economical and environmental-friendly
- Expensive consumables such as CO2 permeable membrane are not required.
- Exhaust CO2 gas and waste waster are not discharged at all as compared with membrane system.
• H2O2 sanitizing is available
- Possible to use 3% H2O2 for the water piping sanitizing, therefore the system is safe against the propagation of bacteria
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