StayClean-F
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Prevents pad corrosion during dicing
Pad corrosion prevention
For workpieces that have a long cut time, such as a workpiece with a small die size and a large diameter, corrosion may occur on the bonding pad due to prolonged exposure to the cutting water. By using StayClean-F, it prevents corrosion due to the formation of an ultra-thin barrier layer on the surface of the workpiece.
Pad corrosion prevention
For workpieces that have a long cut time, such as a workpiece with a small die size and a large diameter, corrosion may occur on the bonding pad due to prolonged exposure to the cutting water. By using StayClean-F, it prevents corrosion due to the formation of an ultra-thin barrier layer on the surface of the workpiece.
Particle adhesion prevention
By using the additive agent StayClean-F, it separates particles from the workpiece surface and prevents adhesion of particles that can not be removed with the spinner wash after dicing.
Low environmental load/Low running cost
StayClean-F can be used in the same environment* as normal dicing and does not include any regulated chemicals, such as substances covered under the RoHS directive or PFOS. Furthermore, since StayClean-F can be used even at diluted concentrations of one part per thousand, and in particular at one part per ten thousand to prevent corrosion, the running costs are low.
*If the cutting water is being recirculated, contact your DISCO sales representative.
Mechanism
- [1] The components of StayClean-F form a barrier layer on the workpiece and this prevents pad corrosion and particle adhesion.
- [2] The components of StayClean-F are removed in the spinner wash process.
The use of StayClean-F has no effect on the process results
When StayClean-F is added to the cutting water, the processing results are the same as for deionized water.
| Workpiece | Si wafer |
| Blade | NBC-ZH |
| Spindle rpm | 40,000 (min-1) |
| Feed speed | 60 mm/s |
StayClean Injector
Using the injector developed exclusively for StayClean, stable supply is possible even at concentrations more dilute than one part per thousand.
Specifications
Cautions before using StayClean-F
- Make sure to read the SDS before using StayClean-F because it describes detailed care regarding its use.
- Do not use StayClean-F for any unintended use.
Cautions regarding the use of StayClean-F
- Take care not to touch your eyes or skin, wear appropriate protective equipment such as gloves and glasses when handling it.
- Avoid using it in conjunction with other chemical agents (in particular strong acids or strong alkalines).
Cautions regarding StayClean-F storage
- Avoid exposure to direct sunlight and store in a cool dark place. Do not place it in a freezer.
- Seal the container properly and then store it.
- With the container still sealed, the warranty period is one year from the date of manufacture.