HogoMax
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HogoMax Series
Water-soluble protective film for laser processing
Highly purified water-soluble protective film for semiconductor processes
- HogoMax is a water-soluble resin that prevents particles from adhering to the wafer surface.
- By applying HogoMax to a laser processed surface using a spin coater, adhesion of debris can be greatly reduced, contributing to improved device reliability.
- In addition, the film can be removed after laser processing simply through cleaning with deionized water.
Water-soluble protective film for laser processing
Highly purified water-soluble protective film for semiconductor processes
- HogoMax is a water-soluble resin that prevents particles from adhering to the wafer surface.
- By applying HogoMax to a laser processed surface using a spin coater, adhesion of debris can be greatly reduced, contributing to improved device reliability.
- In addition, the film can be removed after laser processing simply through cleaning with deionized water.
Full-auto processing from coating to cleaning
All processes, from HogoMax coating and laser processing to cleaning with deionized water, can be performed in fully automatic operation. (Applicable models: DFL7161 and DFL7160)
Protective film coating unit
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