Able to support high precision / high quality processing
X-axis adopts a structure that makes use of the air slider characteristics to achieve improved straightness.
In addition, a linear scale mounted on the Y-axis as standard enables stable axis control and higher positioning accuracy. This supports fine processing needs which require high accuracy, including optical parts and magnetic head cutting and grooving.

Improved throughput
High Z-axis feed speed

Improved functions and operation
The high-speed, high-accuracy NCS (Non-Contact Setup, optional) reduces blade height measurement time for the processing table by 74%. Further processing quality stabilization is achieved through improved measurement accuracy. In addition, the visibility during kerf check was improved by enabling microscope ring light three-channel switching. This model supports SECS/GEM.

Easy operation

• XIS (Extended Interface System)
  Operation buttons consolidated on microscope screens
• Wafer mapping
  Graphic processing condition display similar to full automation equipment.
• Log viewer
  Graphic analog data display and equipment data visualization
• Help viewer
  Displays instructions when error occurs for quick, accurate recovery.

High maintainability

Installation of microscope lens shutter and scope blow function reduces maintenance frequency while improving equipment operation ratio.

*Product appearance, features, specifications, and other details may change due to technical modifications.

*Please read the standard specification sheet thoroughly before use.