EX Series
Model:
EX-300 for Gr-12
The EX series is an adopted motor drive for expansion stage operation.
Expansion stroke and expansion speed can be controlled numerically.
And film auto-cut function is equipped ...
Dry polishing wheels that achieve high die strength while maintaining gettering performance
Applications: Silicon wafer, etc
Due to the ultra-thinning of wafers, loss of gettering performance ...
TEX-218G for up to GR-8
The TEX series is adopted air cylinder for expansion stage operation. It makes
equipment component become simple and realized easy maintenance.